Tan, Zhiyong and Shikida, Mitsuhiro and Hirota, Masafumi and Xing, Yan and Sato, Kazuo and Iwasaki, Takuya and Iriye, Yasuroh (2007) Characteristics of on-wall in-tube flexible thermal flow sensor under radially asymmetric flow condition. Sensors and Actuators A: Physical, 138 (1). 87 - 96.
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Official URL: http://www.sciencedirect.com/science/article/B6THG...
Abstract
We investigated the ability of an on-wall in-tube flexible thermal flow sensor to measure the flow rate under a radially asymmetric flow condition in a curved tube. The sensor was fabricated on a polyimide film substrate using polymer MEMS technologies. A ring-shaped sensing structure was formed by mounting the sensor on the inner-wall surface of a straight tube that follows a curved tube. The sensor characteristics were experimentally evaluated by varying the distance L from the end of the curved tube, the curvature angle θ, and the curvature radius r of the curved tube. The output signals from the sensor were the same when the distance L was over 5 mm at various curvature angles and curvature radiuses. The sensor is thus well suited for measuring the flow rate in spiral tubes.
| Item Type: | Article |
|---|---|
| Uncontrolled Keywords: | Flow sensor; Thermal sensor; Flexible sensor; Polyimide film; Radially asymmetric flow condition |
| Subjects: | Analytical Science > Nanotechnology for sensing and actuating |
| ID Code: | 4867 |
| Deposited By: | SPI |
| Deposited On: | 24 Apr 2009 17:35 |
| Last Modified: | 24 Apr 2009 17:35 |
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