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Characteristics of on-wall in-tube flexible thermal flow sensor under radially asymmetric flow condition

Tan, Zhiyong and Shikida, Mitsuhiro and Hirota, Masafumi and Xing, Yan and Sato, Kazuo and Iwasaki, Takuya and Iriye, Yasuroh (2007) Characteristics of on-wall in-tube flexible thermal flow sensor under radially asymmetric flow condition. Sensors and Actuators A: Physical, 138 (1). 87 - 96.

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Official URL: http://www.sciencedirect.com/science/article/B6THG...

Abstract

We investigated the ability of an on-wall in-tube flexible thermal flow sensor to measure the flow rate under a radially asymmetric flow condition in a curved tube. The sensor was fabricated on a polyimide film substrate using polymer MEMS technologies. A ring-shaped sensing structure was formed by mounting the sensor on the inner-wall surface of a straight tube that follows a curved tube. The sensor characteristics were experimentally evaluated by varying the distance L from the end of the curved tube, the curvature angle θ, and the curvature radius r of the curved tube. The output signals from the sensor were the same when the distance L was over 5 mm at various curvature angles and curvature radiuses. The sensor is thus well suited for measuring the flow rate in spiral tubes.

Item Type:Article
Uncontrolled Keywords:Flow sensor; Thermal sensor; Flexible sensor; Polyimide film; Radially asymmetric flow condition
Subjects:Analytical Science > Nanotechnology for sensing and actuating
ID Code:4867
Deposited By:SPI
Deposited On:24 Apr 2009 17:35
Last Modified:24 Apr 2009 17:35

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