Lee, Jungchul and King, William P. (2007) Microcantilever hotplates: Design, fabrication, and characterization. Sensors and Actuators A: Physical, 136 (1). 291 - 298.
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Official URL: http://www.sciencedirect.com/science/article/B6THG...
This paper describes design, fabrication, and characterization of microhotplates based on microcantilevers. Six different hotplate cantilever designs are proposed to investigate heating response time and temperature uniformity. Devices were fabricated and their electrical, thermal, and mechanical characteristics were measured. The cantilevers have electrical resistance in the 1 kΩ range, consume 1–100 mW power, have a heating and cooling time constant <1 ms, and maximum operation temperature >1000 °C. The temperature uniformity was characterized and is excellent for all of the devices. These cantilevers are targeted for use where both microhotplates and microcantilevers would be useful sensing platforms.
|Additional Information:||25th Anniversary of Sensors and Actuators A: Physical|
|Uncontrolled Keywords:||Microcantilever; Microhotplates; Chemical sensing; Thermal sensors|
|Subjects:||Analytical Science > Nanotechnology for sensing and actuating|
|Deposited On:||27 Apr 2009 10:44|
|Last Modified:||27 Apr 2009 10:44|
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