Nano Archive

Nanotopographical imaging using a heated atomic force microscope cantilever probe

Kim, K. J. and Park, K and Lee, J and Zhang, Zhuomin and King, W. P. (2007) Nanotopographical imaging using a heated atomic force microscope cantilever probe. Sensors and Actuators A: Physical, 136 (1). 95 - 103.

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Official URL: http://www.sciencedirect.com/science/article/B6THG...

Abstract

This paper reports quantitative topographical measurements using a heated atomic force microscope (AFM) cantilever probe. The study compares topographies measured by the cantilever thermal signal to topographies measured by the laser-deflection signal of an AFM system. The experiment used 20 and 100 nm tall Si gratings as topographical test samples. The cantilever heater temperature ranged from 130 to 640 °C, and the cantilever power ranged from 1.5 to 6.6 mW. The measured topography sensitivity, which is the fractional change of the heated cantilever resistance, has a |ΔRcant|/Rcant of 4.5 × 10−5 to 1.1 × 10−3 per vertical nanometer, which is 10–100 times greater than that of similarly sized piezoresistive cantilevers. In a proof of concept demonstration, the heated cantilever measures the topography of a microfabricated platinum line of thickness 100 nm on a silicon dioxide substrate.

Item Type:Article
Additional Information:25th Anniversary of Sensors and Actuators A: Physical
Uncontrolled Keywords:Thermal microscopy; Cantilever; Atomic force microscopy
Subjects:Analytical Science > Microscopy and probe methods
Analytical Science > Nanotechnology for sensing and actuating
ID Code:4844
Deposited By:SPI
Deposited On:27 Apr 2009 11:18
Last Modified:27 Apr 2009 11:19

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