Nano Archive

Squeeze film air damping in MEMS

Bao, Minhang and Yang, Heng (2007) Squeeze film air damping in MEMS. Sensors and Actuators A: Physical, 136 (1). 3 - 27.

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Official URL: http://www.sciencedirect.com/science/article/B6THG...

Abstract

The paper presents an overview and reports the recent progress of research on squeeze film air damping in MEMS. The review starts with the governing equations of squeeze film air damping: the nonlinear isothermal Reynolds equation and various reduced forms of the equation for different conditions. After the basic effects of squeeze film damping on the dynamic performances of micro-structures are discussed based on the analytical solutions to parallel plate problems, recent research on various aspects of squeeze film air damping are reviewed, including the squeeze film air damping of perforated and slotted plate, the squeeze film air damping in rarefied air and the squeeze film air damping of torsion mirrors. Finally, the simulation of squeeze film air damping is reviewed. For quick reference, important equations and curves are included.

Item Type:Article
Additional Information:25th Anniversary of Sensors and Actuators A: Physical
Uncontrolled Keywords:Squeeze film air damping: Reynolds equation; Simulation
Subjects:Analytical Science > Nanotechnology for sensing and actuating
Engineering > Nanotechnology applications in ICT
ID Code:4840
Deposited By:SPI
Deposited On:28 Apr 2009 10:09
Last Modified:28 Apr 2009 10:09

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