Nano Archive

Two-port stacked piezoelectric aluminum nitride contour-mode resonant MEMS

Piazza, Gianluca and Pisano, Albert P. (2007) Two-port stacked piezoelectric aluminum nitride contour-mode resonant MEMS. Sensors and Actuators A: Physical, 136 (2). 638 - 645.

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Official URL: http://www.sciencedirect.com/science/article/B6THG...

Abstract

This paper reports on design, fabrication and experimental testing of a new class of two-port stacked piezoelectric aluminum nitride contour-mode micromechanical resonators that can be used for RF filtering and timing applications. This novel design consists of two layers of thin film AlN stacked on top of each other and excited in contour-mode shapes using the d31 piezoelectric coefficient. Main feature of this design is the ability to reduce capacitive parasitic feedthrough between input and output signals while maintaining strong electromechanical coupling. For example, these piezoelectric contour-mode resonators show a quality factor of 1700 in air and a motional resistances as low as 175 Ω at a frequency of 82.8 MHz. The input to output capacitance has been limited to values below 80 fF, therefore simplifying signal detection even at high frequencies.

Item Type:Article
Additional Information:Micromechanics Section of Sensors and Actuators, Based on Contributions revised from the Technical Digest of the 2006 Solid-State Sensor, Actuator and Microsytems Workshop
Uncontrolled Keywords:Piezoelectric resonators; Two-port resonators; RF MEMS; Contour-mode; Aluminum nitride
Subjects:Analytical Science > Nanotechnology for sensing and actuating
Engineering > Nanotechnology applications in ICT
ID Code:4838
Deposited By:SPI
Deposited On:28 Apr 2009 10:14
Last Modified:28 Apr 2009 10:14

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