Chang, Yuan-Jen and Mohseni, Kamran and Bright, Victor M. (2007) Fabrication of tapered SU-8 structure and effect of sidewall angle for a variable focus microlens using EWOD. Sensors and Actuators A: Physical, 136 (2). 546 - 553. (In Press)
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Official URL: http://www.sciencedirect.com/science/article/B6THG...
Abstract
Electrowetting on dielectric (EWOD) is a promising technology for variable focus liquid microlens. When an electrical field is applied across a liquid droplet and a dielectric layer, the contact angle of the liquid can be tuned with different applied voltages. Therefore, the focal length of a microlens would vary by simply applying an electrical field without any moving mechanical components. In this paper, SU-8 is employed as dielectric layer and structural material in the design of a variable focus liquid microlens using EWOD. A tapered SU-8 structure is created by UV overexposure to confine the droplet and provide the droplet-centering mechanism. The angle of the sidewall is controlled by the width of the exposed area. Contact angle variation of water droplets on SU-8 is measured and favorably compared with the Lippmann–Young equation. The working microlens is demonstrated using images of numbers and laser beam focusing.
| Item Type: | Article |
|---|---|
| Additional Information: | Micromechanics Section of Sensors and Actuators, Based on Contributions revised from the Technical Digest of the 2006 Solid-State Sensor, Actuator and Microsytems Workshop |
| Uncontrolled Keywords: | Electrowetting; SU-8; Microlens |
| Subjects: | Analytical Science > Nanotechnology for sensing and actuating |
| ID Code: | 4833 |
| Deposited By: | SPI |
| Deposited On: | 28 Apr 2009 10:41 |
| Last Modified: | 28 Apr 2009 10:41 |
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