Nano Archive

Carbon nanotube micropatterns and cantilever arrays fabricated with layer-by-layer nano self-assembly

Xue, Wei and Cui, Tianhong (2007) Carbon nanotube micropatterns and cantilever arrays fabricated with layer-by-layer nano self-assembly. Sensors and Actuators A: Physical, 136 (2). 510 - 517.

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The two-dimensional (2D) microstructures and three-dimensional (3D) cantilever arrays based on single-walled carbon nanotube (SWNT) multilayer were fabricated by combining electrostatic layer-by-layer (LbL) nano self-assembly, microlithography, and lift-off. The combinative technique provides a simple, effective, low-cost, and low-temperature fabrication method with a short processing time. The 2D SWNT micropatterns with a feature size of 5 μm were fabricated and characterized. The thickness of a (PDDA/SWNT) bi-layer was measured approximately as 76 Å. SWNTs were randomly deposited on the substrate, and they were interconnected and formed as a dense network. To investigate the potential applications of SWNTs, magnetic cantilever arrays formed with SWNTs, iron oxide (Fe2O3) nanoparticles, and polyelectrolytes were developed. A modified lift-off process was developed to provide additional protection for the cantilever arrays. Due to the outstanding mechanical properties of the SWNTs, the fabricated cantilevers are very strong and highly flexible. The cantilever arrays can be used in applications such as biosensors and microvalves.

Item Type:Article
Additional Information:Micromechanics Section of Sensors and Actuators, Based on Contributions revised from the Technical Digest of the 2006 Solid-State Sensor, Actuator and Microsytems Workshop
Uncontrolled Keywords:Single-walled carbon nanotube (SWNT); Multilayer; Layer-by-layer (LbL) nano self-assembly; Lithography; Lift-off
Subjects:Material Science > Nanofabrication processes and tools
Analytical Science > Nanotechnology for sensing and actuating
Material Science > Nanostructured materials
ID Code:4830
Deposited By:SPI
Deposited On:28 Apr 2009 10:53
Last Modified:28 Apr 2009 10:53

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