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Design of a precision compliant parallel positioner driven by dual piezoelectric actuators

Dong, W and Sun, L. N. and Du, Z. J. (2007) Design of a precision compliant parallel positioner driven by dual piezoelectric actuators. Sensors and Actuators A: Physical, 135 (1). 250 - 256.

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This paper presents a precision compliant parallel-structure positioner, which is dually driven by six piezoelectric motors and six piezoelectric ceramics. This compliant system has a high load capacity of more than 2 kg because the parallel mechanism with high load capacity is the main architecture. This system can also provide relatively large workspace and high accuracy simultaneously compared with conventional compliant positioner systems because it perfectly integrates two kinds of piezoelectric actuators in one system. The end platform has the stroke of 10 mm in three linear motion directions and of 6-arc-degrees in three angle motion directions, respectively, for the adoption of large motion range actuator piezoelectric motors. The positioning resolution and repeatability of the end platform is nanometer scale for the adoption of high precision actuator piezoelectric ceramics.

Item Type:Article
Additional Information:Special Issue of The Micromechanics section of Sensors and Actuators (SAMM, based on contributions revised from the Technical Digest of the IEEE 19th International conference on Micro Electro Mechanical Systems (MEMS 2006), 19th International Conference on Micro Electro Mechanical Systems (MEMS-2006)
Uncontrolled Keywords:Piezoelectric motors; Piezoelectric ceramics; Compliant positioner; Parallel mechanism; Precision positioning
Subjects:Analytical Science > Nanotechnology for sensing and actuating
ID Code:4826
Deposited By:SPI
Deposited On:29 Apr 2009 10:32
Last Modified:29 Apr 2009 10:32

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