Nano Archive

Post-processing techniques for locally self-assembled silicon nanowires

Englander, Ongi and Christensen, Dane and Kim, Jongbaeg and Lin, Liwei (2007) Post-processing techniques for locally self-assembled silicon nanowires. Sensors and Actuators A: Physical, 135 (1). 10 - 15.

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Post-processing techniques are applied after the integration and assembly of nanostructures and Microelectromechanical Systems (MEMS) to realize integrated Nanoelectromechanical Systems (NEMS). Experimentation is focused specifically on the application of post-processing steps to a locally self-assembled micro-to-nano system comprising of suspended silicon nanowires between two MEMS bridges. Local contact metallization, global metallization for rapid system functionalization and the application of aqueous treatment to the NEMS are among the post-processing techniques studied. These techniques are evaluated for their effectiveness and compatibility with integrated NEMS and traditional MEMS processes. It is found that local and global contact metallization techniques effectively alleviate inherent problems at the nano-to-micro contact and the aqueous treatment study confirms the effectiveness of the super critical drying process for nanostructures.

Item Type:Article
Additional Information:Special Issue of The Micromechanics section of Sensors and Actuators (SAMM, based on contributions revised from the Technical Digest of the IEEE 19th International conference on Micro Electro Mechanical Systems (MEMS 2006), 19th International Conference on Micro Electro Mechanical Systems (MEMS-2006)
Uncontrolled Keywords:NEMS; Silicon nanowires; Integration; Post-processing
Subjects:Material Science > Nanofabrication processes and tools
Analytical Science > Nanotechnology for sensing and actuating
Engineering > Nanotechnology applications in ICT
ID Code:4820
Deposited By:SPI
Deposited On:29 Apr 2009 13:17
Last Modified:29 Apr 2009 13:17

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