Chun, Dong Won and Hwang, Kyo Seon and Eom, Kilho and Lee, Jeong Hoon and Cha, Byung Hak and Lee, Woo Young and Yoon, Dae Sung and Kim, Tae Song (2007) Detection of the Au thin-layer in the Hz per picogram regime based on the microcantilevers. Sensors and Actuators A: Physical, 135 (2). 857 - 862.
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Official URL: http://www.sciencedirect.com/science/article/B6THG...
Through the use of oscillating microcantilevers, a micromechanical mass detection with a resolution of a Hz per picogram regime is reported. Through MEMS processes, piezoelectric microcantilevers that are simultaneously capable of self-actuation and the electrical measurement of resonant frequencies were fabricated. Mass detection in the Hz per picogram regime is demonstrated with a deposition of an Au thin-layer, of which the thickness is precisely controlled. In addition, it is shown that a scaling down of the microcantilevers enhances the sensitivity during the micromechanical mass detection.
|Uncontrolled Keywords:||Microcantilever; Micromechanical mass detection; Analytical sensitivity; Resonant frequency|
|Subjects:||Analytical Science > Nanotechnology for sensing and actuating|
|Deposited On:||06 May 2009 10:18|
|Last Modified:||06 May 2009 10:18|
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