Deshpande, Mandar and Saggere, Laxman (2007) PZT thin films for low voltage actuation: Fabrication and characterization of the transverse piezoelectric coefficient. Sensors and Actuators A: Physical, 135 (2). 690 - 699.
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Official URL: http://www.sciencedirect.com/science/article/B6THG...
Transverse piezoelectric coefficient d31 is a very important characteristic of lead zirconate titanate (PZT) thin films, which have great significance for enabling MEMS applications. In this work, the d31 characteristics of PZT thin-films actuated at low voltages of less than 1 V are investigated. Square-shaped bending-type PZT thin film microactuators comprising 600 nm thick sol–gel derived 52/48 PZT thin film on SiO2/Ta/Pt layers are fabricated using thin film deposition techniques and experimentally characterized for their piezoelectric behavior. Specifically, the characteristic of the in-plane transverse piezoelectric coefficient d31 is studied as a function of the PZT poling electric fields as well as the applied actuation voltages both at low voltages (<1 V) and high voltages (1–10 V). The d31 values of the PZT material are estimated via an experiment-model correlation where experimentally measured deflections and modal characteristics of the thin film actuator are corroborated with deflections and modal characteristics of the actuator in a finite element model. The results of the work presented show that d31 values of the PZT thin film material are considerably lower at low actuation voltages (<1 V) than at high actuation voltages (5–10 V) and that these values generally improve with the poling electric fields of the PZT sample. For the PZT thin films investigated in this work, a maximum effective d31 value for low actuation voltages was estimated to be −30 pC/N, and a maximum effective d31 value for higher actuation voltages that approach the coercive field of the PZT film was estimated to be −55 pC/N.
|Uncontrolled Keywords:||Piezoelectric thin films; PZT; Piezoelectric coefficient; Microactuator|
|Subjects:||Analytical Science > Nanotechnology for sensing and actuating|
|Deposited On:||06 May 2009 10:31|
|Last Modified:||06 May 2009 10:31|
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