Nano Archive

Flexible thin film temperature and strain sensor array utilizing a novel sensing concept

Lichtenwalner, Daniel J. and Hydrick, Aaron E. and Kingon, Angus I. (2007) Flexible thin film temperature and strain sensor array utilizing a novel sensing concept. Sensors and Actuators A: Physical, 135 (2). 593 - 597.

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Official URL: http://www.sciencedirect.com/science/article/B6THG...

Abstract

Flexible arrays of resistive temperature and strain sensors have been designed, and fabricated on polyimide sheets. We describe a novel sensor design concept, utilizing materials selection combined with specific device layout design, such that both temperature and strain values can be determined from resistance values of parallel sensor pairs, regardless of complex strain fields or temperature distribution. Fabrication of thin film Pt and NiCr resistive sensor arrays, with Cu conducting lines, on polyimide demonstrates the sensing concept. Temperature and strain sensing capabilities are demonstrated for temperatures up to 200 °C and up to 2% tensile strain.

Item Type:Article
Uncontrolled Keywords:Thin film sensor array; Temperature sensor; Strain gage; Pt; NiCr; Polyimide
Subjects:Analytical Science > Nanotechnology for sensing and actuating
ID Code:4806
Deposited By:SPI
Deposited On:06 May 2009 10:45
Last Modified:06 May 2009 10:45

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