Nano Archive

Piezoelectric aluminum nitride MEMS annular dual contour mode filter

Stephanou, Philip J. and Piazza, Gianluca and White, Carolyn D. and Wijesundara, Muthu B. J. and Pisano, Albert P. (2007) Piezoelectric aluminum nitride MEMS annular dual contour mode filter. Sensors and Actuators A: Physical, 134 (1). 152 - 160.

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Official URL: http://www.sciencedirect.com/science/article/B6THG...

Abstract

The following work presents the analytical, numerical and experimental characterization of a novel piezoelectric aluminum nitride MEMS bandpass filter. In contrast to multi-pole filters employing distinct mechanically or electrically coupled resonator building blocks, the passband of the device in the present work is defined by the proximity of two natural contour modes of vibration in a single annular resonator. The proposed implementation, albeit currently limited to dual-pole filters, results in smaller form factors and reduces device sensitivity to across wafer fabrication tolerances. A filter with 4.8 dB of insertion loss, a 22.4 MHz center frequency, a TCF of approximately −20 ppm/°C, and 0.5% fractional bandwidth at −3 dB is demonstrated.

Item Type:Article
Additional Information:International Mechanical Engineering congress and Exposition 2005 - IMECE 2005, American Society of Mechanical Engineering International Mechanical Engineering Congress and Exposition
Uncontrolled Keywords:RF MEMS; Contour mode; Aluminum nitride; Piezoelectric resonator; Bandpass filter; Dual mode resonator
Subjects:Analytical Science > Nanotechnology for sensing and actuating
Engineering > Nanotechnology applications in ICT
ID Code:4791
Deposited By:SPI
Deposited On:07 May 2009 10:37
Last Modified:07 May 2009 10:37

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