Nano Archive

Frequency dependent fluid damping of micro/nano flexural resonators: Experiment, model and analysis

Zhang, Weibin and Turner, Kimberly (2007) Frequency dependent fluid damping of micro/nano flexural resonators: Experiment, model and analysis. Sensors and Actuators A: Physical, 134 (2). 594 - 599.

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Official URL: http://www.sciencedirect.com/science/article/B6THG...

Abstract

This research systematically investigates the fluid damping for micromachined beam-type resonators with high resonant frequencies. The work is aimed to find a general fluid damping law which can quantitatively be used as a design tool for the resonance-based micro sensors by accurately predicting the quality factor for resonators operated in air or liquid. Micro-cantilevers with different dimensions are fabricated and tested in order to extract the damping characteristics. Combined with dimensional analysis, a novel linear fluid damping model is proposed, considering the effects from both device's dimension and the resonant frequency. Further by numerical analysis, the model is generalized to resonators with differently shaped cross-sections. Also the proposed fluid damping model provides an attractive way to use simple beam-type resonators as fluid viscosity sensors and air pressure sensors.

Item Type:Article
Uncontrolled Keywords:Resonator; Quality factor; Fluid damping; Drag force
Subjects:Analytical Science > Nanotechnology for sensing and actuating
ID Code:4780
Deposited By:SPI
Deposited On:07 May 2009 12:32
Last Modified:07 May 2009 12:32

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