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Support loss in the radial bulk-mode vibrations of center-supported micromechanical disk resonators

Hao, Zhili and Ayazi, Farrokh (2007) Support loss in the radial bulk-mode vibrations of center-supported micromechanical disk resonators. Sensors and Actuators A: Physical, 134 (2). 582 - 593.

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Official URL: http://www.sciencedirect.com/science/article/B6THG...

Abstract

This paper presents a comprehensive analysis of support loss, the dominant loss mechanism, in center-supported micromechanical disk resonators operating in their radial bulk-modes. Through separation and coupling between the three components (disk, support beam, and support structure) of a disk resonator, support loss is evaluated quantitatively and the closed-form expression is obtained for support quality factor (Qsupport) of a center-supported disk resonator. The comparison between theoretical analysis and experimental data shows good agreement. This work provides significant insights into the geometrical design and choice of materials in high-Q center-supported disk resonant structures. To minimize support loss, a quarter wavelength rule exists for the height of the support beam in a center-supported disk resonator, similar to the length of torsion support beams of a free–free flexural beam resonator.

Item Type:Article
Uncontrolled Keywords:Disk resonators; Radial bulk-mode; Support loss; Quality factor (Q); Elastic waves; Semi-infinite medium
Subjects:Analytical Science > Nanotechnology for sensing and actuating
ID Code:4779
Deposited By:SPI
Deposited On:07 May 2009 12:35
Last Modified:07 May 2009 12:35

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