Duval, Fabrice F. C. and Wilson, Stephen A. and Ensell, Graham and Evanno, Nicolas M. P. and Cain, Markys G. and Whatmore, Roger W. (2007) Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor. Sensors and Actuators A: Physical, 133 (1). 35 - 44.
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Official URL: http://www.sciencedirect.com/science/article/B6THG...
Abstract
This paper reports on the measurements of displacement and blocking force of piezoelectric micro-cantilevers. The free displacement was studied using a surface profiler and a laser vibrometer. The experimental data were compared with an analytical model which showed that the PZT thin film has a Young's modulus of 110 GPa and a piezoelectric coefficient d31,f of 30 pC/N. The blocking force was investigated by means of a micro-machined silicon force sensor based on the silicon piezoresistive effect. The generated force was detected by measuring a change in voltage within a piezoresistors bridge. The sensor was calibrated using a commercial nano-indenter as a force and displacement standard. Application of the method showed that a 700 μm long micro-cantilever showed a maximum displacement of 800 nm and a blocking force of 0.1 mN at an actuation voltage of 5 V, within experimental error of the theoretical predictions based on the known piezoelectric and elastic properties of the PZT film.
| Item Type: | Article |
|---|---|
| Uncontrolled Keywords: | PZT; Cantilevers; Vibrometry; Force sensors; Blocking force |
| Subjects: | Analytical Science > Nanotechnology for sensing and actuating |
| ID Code: | 4760 |
| Deposited By: | SPI |
| Deposited On: | 08 May 2009 12:42 |
| Last Modified: | 08 May 2009 12:42 |
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