Nano Archive

Integrated SPM probes with NEMS technology

Li, Xinxin and Han, Jianqiang and Bao, Haifei and Yang, Zunxian (2007) Integrated SPM probes with NEMS technology. Sensors and Actuators A: Physical, 133 (2). 383 - 387.

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Official URL: http://www.sciencedirect.com/science/article/B6THG...

Abstract

Two kinds of integrated scanning probe microscope (SPM) probes are developed. The first kind is AFM probes realized with a novel masked–maskless combined etching process. Both the nano-tips for scanning and the bending cantilevers are simultaneously formed with the masked–maskless combined anisotropic etching technique. The simultaneous formation method effectively avoids damage to the previously formed tips when the cantilever shaping is processed. The testing results for the probes show the imaging quality comparable with commercial probes. The second kind of probes is an integrated probe with both a piezoresistive sensor and an electric-heated tip. This kind of probe is used for thermal–mechanical data storage, with the pulse-heated tip for data writing and the piezoresistive sensor for data reading. Nano-sized bumps have been formed by probe scanning on PMMA thin film, resulting in a storage density beyond 30 GB/in.2.

Item Type:Article
Additional Information:Selected Papers from the 9th International Conference on Materials for Advanced Technologies - ICMAT 2005 SI, Selected Papers from the 9th International Conference on Materials for Advanced Technologies
Uncontrolled Keywords:previous termSPM probenext term; Maskless etching; Data storage
Subjects:Analytical Science > Microscopy and probe methods
Analytical Science > Nanotechnology for sensing and actuating
Engineering > Nanotechnology applications in ICT
ID Code:4753
Deposited By:SPI
Deposited On:08 May 2009 16:47
Last Modified:08 May 2009 16:47

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