Nano Archive

Surface nanostructuring by femtosecond laser irradiation through near-field scanning optical microscopy

Lin, Y and Hong, M. H. and Wang, W. J. and Wang, Z. B. and Chen, G. X. and Xie, Q and Tan, L. S. and Chong, T. C. (2007) Surface nanostructuring by femtosecond laser irradiation through near-field scanning optical microscopy. Sensors and Actuators A: Physical, 133 (2). 311 - 316.

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Official URL: http://www.sciencedirect.com/science/article/B6THG...

Abstract

A near-field scanning optical microscopy (NSOM) and a double-frequency femtosecond laser (400 nm, 100 fs) were applied to push the optical resolution further down to sub-50 nm on thin UV photoresist. A 20-nm feature size can be obtained. It is at a resolution of λ/20 (λ: laser wavelength) and a/2 (a: NSOM probe aperture diameter), respectively. It is proved that laser power and exposure time can affect feature size of lithography patterns. In this paper, the effect of probe-to-sample distance on dot-pattern features is studied, and different dot-pattern shapes are generated: dumbbell-dot, ellipsoid-dot and circle-dot. The simulated light field spatial distributions across the nano-aperture based on Bethe–Bouwkamp model is found to agree with experimental results very well.

Item Type:Article
Additional Information:Selected Papers from the 9th International Conference on Materials for Advanced Technologies - ICMAT 2005 SI, Selected Papers from the 9th International Conference on Materials for Advanced Technologies
Uncontrolled Keywords:Near-field scanning optical microscopy; Femtosecond laser; Bethe–Bouwkamp model
Subjects:Analytical Science > Microscopy and probe methods
Analytical Science > Nanotechnology for sensing and actuating
ID Code:4750
Deposited By:SPI
Deposited On:30 Jun 2009 12:38
Last Modified:30 Jun 2009 12:38

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