Lin, Y and Hong, M. H. and Wang, W. J. and Wang, Z. B. and Chen, G. X. and Xie, Q and Tan, L. S. and Chong, T. C. (2007) Surface nanostructuring by femtosecond laser irradiation through near-field scanning optical microscopy. Sensors and Actuators A: Physical, 133 (2). 311 - 316.
Full text is not hosted in this archive but may be available via the Official URL, or by requesting a copy from the corresponding author.
Official URL: http://www.sciencedirect.com/science/article/B6THG...
A near-field scanning optical microscopy (NSOM) and a double-frequency femtosecond laser (400 nm, 100 fs) were applied to push the optical resolution further down to sub-50 nm on thin UV photoresist. A 20-nm feature size can be obtained. It is at a resolution of λ/20 (λ: laser wavelength) and a/2 (a: NSOM probe aperture diameter), respectively. It is proved that laser power and exposure time can affect feature size of lithography patterns. In this paper, the effect of probe-to-sample distance on dot-pattern features is studied, and different dot-pattern shapes are generated: dumbbell-dot, ellipsoid-dot and circle-dot. The simulated light field spatial distributions across the nano-aperture based on Bethe–Bouwkamp model is found to agree with experimental results very well.
|Additional Information:||Selected Papers from the 9th International Conference on Materials for Advanced Technologies - ICMAT 2005 SI, Selected Papers from the 9th International Conference on Materials for Advanced Technologies|
|Uncontrolled Keywords:||Near-field scanning optical microscopy; Femtosecond laser; Bethe–Bouwkamp model|
|Subjects:||Analytical Science > Microscopy and probe methods|
Analytical Science > Nanotechnology for sensing and actuating
|Deposited On:||30 Jun 2009 12:38|
|Last Modified:||30 Jun 2009 12:38|
Repository Staff Only: item control page