Nano Archive

Design and modeling of a MEMS pico-Newton loading/sensing device

Samuel, B. A. and Desai, A. V. and Haque, M. A. (2006) Design and modeling of a MEMS pico-Newton loading/sensing device. Sensors and Actuators A: Physical, 127 (1). 155 - 162.

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In this paper we present a novel MEMS force sensor that exploits the post-buckling phenomenon of slender silicon columns. The design philosophy and fabrication process is discussed and analytical expressions for the force-displacement characteristics are developed. The sensor can be used to perform quantitative and qualitative measurements in-situ in SEM, TEM or STM, where the small chamber size makes it challenging to integrate conventional force-displacement sensors. Potential applications for the sensor are characterization of carbon nanotube-polymer interfaces, nanoscale thin film testing and mechanical testing of single biological cells.

Item Type:Article
Uncontrolled Keywords:Micro-electro-mechanical systems (MEMS) force sensor; Post buckling phenomenon; Non-linear stiffness; Displacement amplification; Compliant mechanism
Subjects:Analytical Science > Nanotechnology for sensing and actuating
Material Science > Nanostructured materials
ID Code:4740
Deposited By:SPI
Deposited On:30 Jun 2009 14:40
Last Modified:30 Jun 2009 14:40

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