Nano Archive

Parylene-strengthened thermal isolation technology for microfluidic system-on-chip applications

Shih, Chi-Yuan and Chen, Yang and Tai, Yu-Chong (2006) Parylene-strengthened thermal isolation technology for microfluidic system-on-chip applications. Sensors and Actuators A: Physical, 126 (1). 270 - 276.

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Here we reported a novel technology using parylene-cross-linking structure to achieve on-chip air-gap thermal isolation for microfluidic system-on-chip (SOC) applications. Two applications based on this technology, on-chip temperature gradient liquid chromatography (TGLC) and on-chip continuous-flow polymerase chain reaction (PCR) were successfully demonstrated. Device thermal performance in each example was characterized. Results showed that our technology not only provides excellent on-chip thermal isolation but also its simplicity of integration with other on-chip components makes versatile microfluidic SOC applications feasible.

Item Type:Article
Uncontrolled Keywords:Parylene; Thermal isolation; Microfluidic; On-chip; Chromatography; PCR
Subjects:Analytical Science > Nanotechnology for sensing and actuating
ID Code:4730
Deposited By:SPI
Deposited On:30 Jun 2009 16:22
Last Modified:30 Jun 2009 16:22

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