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Simultaneous optical/electrical interconnection of polymer planar-lightwave-circuit chip based on polymer MOEMS and replication technology

Kim, Jin Tae and Choi, Choon-Gi (2006) Simultaneous optical/electrical interconnection of polymer planar-lightwave-circuit chip based on polymer MOEMS and replication technology. Sensors and Actuators A: Physical, 126 (2). 425 - 429.

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Official URL: http://www.sciencedirect.com/science/article/B6THG...

Abstract

For simultaneous optical/electrical interconnection of a polymeric planar-lightwave-circuit (PLC) chip, a polymer micro-opto-electro-mechanical system (MOEMS)-based passive alignment method was designed and realized in thermosetting polymer using a UV imprinting technique. To reduce the steps for fabricating alignment structures, waveguide cores and micro-pedestals were formed at the same time with only one step of imprinting. By inserting the electrode-patterned micro-pedestals on the polymer PLC chip into the alignment pits of the silicon optical bench, optical/electrical interconnections were accomplished simultaneously and automatically. An assembled polymeric optical device shows a coupling loss of about 1.7 dB per coupling face and a good electrical interconnection at a wavelength of 1.5 μm.

Item Type:Article
Uncontrolled Keywords:Polymer PLC; MOEMS; Replication; UV imprinting; Optoelectronic interconnection
Subjects:Analytical Science > Nanotechnology for sensing and actuating
ID Code:4719
Deposited By:SPI
Deposited On:06 Jul 2009 12:38
Last Modified:06 Jul 2009 12:38

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