Samuel, B. A. and Desai, A. V. and Haque, M. A. (2006) Design and modeling of a MEMS pico-Newton loading/sensing device. Sensors and Actuators A: Physical, 127 (1). 155 - 162.
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Official URL: http://www.sciencedirect.com/science/article/B6THG...
In this paper we present a novel MEMS force sensor that exploits the post-buckling phenomenon of slender silicon columns. The design philosophy and fabrication process is discussed and analytical expressions for the force-displacement characteristics are developed. The sensor can be used to perform quantitative and qualitative measurements in-situ in SEM, TEM or STM, where the small chamber size makes it challenging to integrate conventional force-displacement sensors. Potential applications for the sensor are characterization of carbon nanotube-polymer interfaces, nanoscale thin film testing and mechanical testing of single biological cells.
|Uncontrolled Keywords:||Micro-electro-mechanical systems (MEMS) force sensor; Post buckling phenomenon; Non-linear stiffness; Displacement amplification; Compliant mechanism|
|Subjects:||Analytical Science > Microscopy and probe methods|
Material Science > Nanofabrication processes and tools
Analytical Science > Nanotechnology for sensing and actuating
Biomedical Science > Nanobiotechnology
|Deposited On:||08 Apr 2009 12:27|
|Last Modified:||08 Apr 2009 12:27|
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