Parylene-strengthened thermal isolation technology for microfluidic system-on-chip applications

Abstract

Here we reported a novel technology using parylene-cross-linking structure to achieve on-chip air-gap thermal isolation for microfluidic system-on-chip (SOC) applications. Two applications based on this technology, on-chip temperature gradient liquid chromatography (TGLC) and on-chip continuous-flow polymerase chain reaction (PCR) were successfully demonstrated. Device thermal performance in each example was characterized. Results showed that our technology not only provides excellent on-chip thermal isolation but also its simplicity of integration with other on-chip components makes versatile microfluidic SOC applications feasible.