Li, Bo and Chen, Quanfang (2006) Solid micromechanical valves fabricated with in situ UV-LIGA assembled nickel. Sensors and Actuators A: Physical, 126 (1). 187 - 193.
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Official URL: http://www.sciencedirect.com/science/article/B6THG...
Abstract
In situ UV-LIGA assembled robust microcheck valves with large flow rates (>10 ml/s, displacement related), high-pressure support ability (>10 MPa) and high operational frequencies (>10 kHz) made of nano-structured nickel were presented in this paper. The microvalve consists of an array of 80 single microvalves to achieve the required flow rates. A novel in situ UV-LIGA process was developed for the fabrication. Test results show that the forward flow rate is about 19 ml/s under pressure of 90 psi. The backward flow rate is negligible. The loading/unloading test results show that the flow rates were repeated very well over a large range of tested pressure differences. The reliability of the valve is ensured by the low stress valve design and the robust nano-structured nickel material fabricated.
| Item Type: | Article |
|---|---|
| Uncontrolled Keywords: | In situ UV-LIGA assemble; Robust microvalve; Solid nickel |
| Subjects: | Engineering > Nanotechnology applications in mechanical engineering Analytical Science > Nanotechnology for sensing and actuating |
| ID Code: | 4694 |
| Deposited By: | SPI |
| Deposited On: | 08 Apr 2009 14:22 |
| Last Modified: | 08 Apr 2009 14:22 |
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