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Design study of piezoelectric micro-machined mechanically coupled cantilever filters using a combined finite element and microwave circuit analysis

Zhu, Meiling and Kirby, Paul B. (2006) Design study of piezoelectric micro-machined mechanically coupled cantilever filters using a combined finite element and microwave circuit analysis. Sensors and Actuators A: Physical, 126 (2). 417 - 424.

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Official URL: http://www.sciencedirect.com/science/article/B6THG...

Abstract

A new mechanical filter structure is presented which comprises two silicon cantilevers mechanically coupled by a silicon linkage with thin film piezoelectric transducers providing electrical input and output signals. The resonance behaviour of such a structure results in a band-pass filter response, having a band-width determined by the frequency separation between the closely spaced in-phase and out-of-phase vibrational modes of the two coupled cantilevers. A detailed configuration design analysis, filter simulation and optimisation of performance is undertaken using a new modelling approach combining microwave circuit theory and finite element analysis to evaluate the generalised (A, B, C and D) and scattering (S) circuit parameters of the filter. Two significant features of the filters have emerged from the derived analyses and simulations: (1) with correct design filter Q-values can reach several thousand which is much higher than the Q-values (80) of uncoupled cantilevers, (2) the Q-value is determined by the configuration of the silicon linkage and so is under the designer's control. The position and length of the linkage that give optimum Q and minimum insertion loss are determined.

Item Type:Article
Uncontrolled Keywords:Coupled cantilevers; Piezoelectric mechanical filters; Microwave circuit; FEA
Subjects:Analytical Science > Nanotechnology for sensing and actuating
Engineering > Nanotechnology applications in ICT
ID Code:4685
Deposited By:SPI
Deposited On:08 Apr 2009 14:52
Last Modified:08 Apr 2009 14:52

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