Nano Archive

Elastomer mask for powder blasting microfabrication

Sayah, A. and Parashar, V. K. and Pawlowski, A. -G. and Gijs, M. A. M. (2005) Elastomer mask for powder blasting microfabrication. Sensors and Actuators A: Physical, 125 (1). 84 - 90.

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Official URL: http://www.sciencedirect.com/science/article/B6THG...

Abstract

We report the use of poly(dimethylsiloxane) and flexopolymer as masking materials for the three-dimensional micro-structuring of glass using powder blasting technology. Such elastomer masks provide a promising alternative to metallic contact masks for the definition of microstructures. A mask thickness up to 100 μm with feature size down to 15 μm is obtained. These elastomer masks show an excellent erosion resistance to powder blasting and a selectivity of up to 5000 with respect to brittle materials like glass and PZT materials.

Item Type:Article
Uncontrolled Keywords:Powder blasting; Elastomer; Mask technology; Flexopolymer
Subjects:Analytical Science > Nanotechnology for sensing and actuating
ID Code:4681
Deposited By:SPI
Deposited On:08 Apr 2009 15:03
Last Modified:08 Apr 2009 15:03

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