Sayah, A. and Parashar, V. K. and Pawlowski, A. -G. and Gijs, M. A. M. (2005) Elastomer mask for powder blasting microfabrication. Sensors and Actuators A: Physical, 125 (1). 84 - 90.
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Official URL: http://www.sciencedirect.com/science/article/B6THG...
We report the use of poly(dimethylsiloxane) and flexopolymer as masking materials for the three-dimensional micro-structuring of glass using powder blasting technology. Such elastomer masks provide a promising alternative to metallic contact masks for the definition of microstructures. A mask thickness up to 100 μm with feature size down to 15 μm is obtained. These elastomer masks show an excellent erosion resistance to powder blasting and a selectivity of up to 5000 with respect to brittle materials like glass and PZT materials.
|Uncontrolled Keywords:||Powder blasting; Elastomer; Mask technology; Flexopolymer|
|Subjects:||Analytical Science > Nanotechnology for sensing and actuating|
|Deposited On:||08 Apr 2009 15:03|
|Last Modified:||08 Apr 2009 15:03|
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