Sayah, A. and Parashar, V. K. and Pawlowski, A. -G. and Gijs, M. A. M. (2005) Elastomer mask for powder blasting microfabrication. Sensors and Actuators A: Physical, 125 (1). 84 - 90.
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Official URL: http://www.sciencedirect.com/science/article/B6THG...
Abstract
We report the use of poly(dimethylsiloxane) and flexopolymer as masking materials for the three-dimensional micro-structuring of glass using powder blasting technology. Such elastomer masks provide a promising alternative to metallic contact masks for the definition of microstructures. A mask thickness up to 100 μm with feature size down to 15 μm is obtained. These elastomer masks show an excellent erosion resistance to powder blasting and a selectivity of up to 5000 with respect to brittle materials like glass and PZT materials.
| Item Type: | Article |
|---|---|
| Uncontrolled Keywords: | Powder blasting; Elastomer; Mask technology; Flexopolymer |
| Subjects: | Analytical Science > Nanotechnology for sensing and actuating |
| ID Code: | 4681 |
| Deposited By: | SPI |
| Deposited On: | 08 Apr 2009 15:03 |
| Last Modified: | 08 Apr 2009 15:03 |
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