Nano Archive

Nonlinear and hysteretic influence of piezoelectric actuators in AFMs on lateral dimension measurement

Huang, Qiangxian and Gonda, Satoshi and Misumi, Ichiko and Sato, Osamu and Keem, Taeho and Kurosawa, Tomizo (2006) Nonlinear and hysteretic influence of piezoelectric actuators in AFMs on lateral dimension measurement. Sensors and Actuators A: Physical, 125 (2). 590 - 596.

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Official URL: http://www.sciencedirect.com/science/article/B6THG...

Abstract

A real-time measuring ‘Nano-metrological Atomic Force Microscope’ system equipped with an ultra-high resolution three-axis laser interferometer system is developed, in which the undesirable properties of piezoelectric actuators are compensated completely. Using this AFM and a one-dimensional (1D) grating reference standard with pitches of 240 nm, which is one of the widely used reference standards as nano-metrological lateral scales, the influences of nonlinear and hysteretic characteristics of piezoelectric actuators on image reconstruction and lateral dimension measurement are examined and compared quantitatively among three different measurement methods. The three measurement methods are: (1) the relative movement between probe tip and sample is controlled and measured directly by voltage signals applied on the XYZ scanner, the nonlinear and hysteretic characteristics of piezoelectric actuators are not compensated; (2) the relative movement between probe tip and sample is controlled by voltage signals applied on the XYZ scanner, but it is measured accurately by interferometers; (3) the relative movement between probe tip and sample in lateral directions are both controlled and measured accurately by interferometers. According to the comparison results, an accurate displacement control system is key to reduce the influences of undesirable properties of piezoelectric actuators and the developed AFM system with three-axis laser interferometer system is proved to eliminate the nonlinear and hysteretic characteristics of piezoelectric actuators completely.

Item Type:Article
Uncontrolled Keywords:AFM; Piezoelectric actuator; Nonlinear characteristic; Hysteretic characteristic; 1D grating; Reference standard; Lateral dimension
Subjects:Analytical Science > Microscopy and probe methods
Analytical Science > Nanotechnology for sensing and actuating
ID Code:4677
Deposited By:SPI
Deposited On:08 Apr 2009 15:13
Last Modified:08 Apr 2009 15:13

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