Fabrication and frequency response of dual-element ultrasonic transducer using PZT-5A thick film

Abstract

Ultrasonic transducers based on PZT-5A thick films deposited onto polycrystalline Al2O3 substrates using screen-printing were successfully fabricated. Considering the relatively high sintering temperature of PZT-5A thick films and better impedance matching characteristics with PZT-5A, polished polycrystalline Al2O3 were used as substrates. For electrodes, high quality platinum (Pt) was deposited by a thin film process, because the surface state of electrodes greatly affects the quality of piezoelectric films. Applying Pt/PZT-5A/Pt/Al2O3 structures, dual-element ultrasonic transducers were assembled. The assembled transducers included a wear plate (normally alumina with 40.21 × 106 kg/m2 s of impedance), backing (tungsten carbide-epoxy), electrical matching, an epoxy glue layer, and a housing. The optimum measurement ranges of 5 and 10 MHz ultrasonic transducers were 2.51–300.2 and 2.50–250.1 mm, respectively. From the time and frequency response measurements of the assembled 10 MHz DEUTs, the value of −20 dB level waveform duration and the −6 dB bandwidth was 481.8 ns and 34.4%, respectively. Also, the measurement accuracies of both 5 and 10 MHz DEUTs assembled in this study were below 0.1 and 0.4%, respectively.