Nano Archive

Design, fabrication, and testing of a 3-DOF HARM micromanipulator on (1 1 1) silicon substrate

Chang, Heng-Chung and Tsai, Julius Ming-Lin and Tsai, Hsin-Chang and Fang, Weileun (2006) Design, fabrication, and testing of a 3-DOF HARM micromanipulator on (1 1 1) silicon substrate. Sensors and Actuators A: Physical, 125 (2). 438 - 445.

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In this study, a novel HARM (high aspect ratio micromachining) micromanipulator fabricated on (1 1 1) silicon wafer is reported. The micromanipulator consists of a positioning stage, a robot arm, supporting platforms, conducting wires, and bonding pads. These components are monolithically integrated on a chip through the presented processes. The three-degrees-of-freedom (3-DOF) positioning of the micromanipulator is realized by using the integration of two linear comb actuators and a vertical comb actuator. The robot arm is used to manipulate samples with dimension in the order of several microns to several hundred microns, for instance, optical fibers and biological samples. The robot arm could be a gripper, a needle, a probe, or even a pipette. Since the micromanipulator is made of single crystal silicon, it has superior mechanical properties. A micro gripper has also been successfully designed and fabricated.

Item Type:Article
Uncontrolled Keywords:Micromanipulator; Micro robot arm; Micro gripper; 3-DOF; (1 1 1)Wafer
Subjects:Engineering > Nanotechnology applications in mechanical engineering
Analytical Science > Nanotechnology for sensing and actuating
ID Code:4668
Deposited By:SPI
Deposited On:08 Apr 2009 17:08
Last Modified:08 Apr 2009 17:08

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