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Hysteresis and creep compensation for piezoelectric actuator in open-loop operation

Changhai, Ru and Lining, Sun (2005) Hysteresis and creep compensation for piezoelectric actuator in open-loop operation. Sensors and Actuators A: Physical, 122 (1). 124 - 130.

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Piezoelectric actuators are frequently used nowadays in a wide variety of positioning devices. However, a major deficiency of piezoelectric actuators is that their open-loop control accuracy is seriously limited by hysteresis and creep effects. This paper describes a method for simultaneous compensation of the hysteresis and creep of piezoelectric actuator based on an inverse control in open-loop operation. The basis of the inverse control is formed by a hysteresis mathematical model and a creep model, which can describe precisely two phenomena. The method of solving inverse models of hysteresis and creep is described detailedly. Finally, a tracking control experiment of piezoelectric actuators for a desired trajectory is performed according to the proposed method and the experimental results demonstrate that the positioning precision is noticeably improved in open-loop operation compared to the conventional open-loop control without any compensation.

Item Type:Article
Additional Information:SSSAMW 04 - Special Section of the Micromechanics Section of Sensors and Actuators based on contributions revised from the Technical Digest of the 2004 Solid-State Sensor, Actuator and Microsystems Workshop.
Uncontrolled Keywords:Piezoelectric actuator; Hysteresis; Creep; Inverse control
Subjects:Analytical Science > Nanotechnology for sensing and actuating
ID Code:4659
Deposited By:SPI
Deposited On:08 Apr 2009 17:31
Last Modified:08 Apr 2009 17:31

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