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A thermal bimorph micromirror with large bi-directional and vertical actuation

Jain, Ankur and Qu, Hongwei and Todd, Shane and Xie, Huikai (2005) A thermal bimorph micromirror with large bi-directional and vertical actuation. Sensors and Actuators A: Physical, 122 (1). 9 - 15.

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This paper reports a novel large vertical displacement (LVD) microactuator that can generate large piston motion and bi-directional scanning at low driving voltage. A LVD micromirror device has been fabricated by using a unique deep reactive ion etch (DRIE) post-CMOS micromachining process that simultaneously provides thin-film and single-crystal silicon microstructures. The bimorph actuation structure is composed of aluminum and silicon dioxide with an embedded polysilicon thermal resistor. With a size of only 0.7 mm × 0.32 mm, the LVD micromirror demonstrated a vertical displacement of 0.2 mm at 6 V dc. This device can also be used to perform bi-directional rotational scanning through the use of two bimorph actuators. The micromirror rotates over ±15° at less than 6 V dc, and over ±43° (i.e., >170° optical scan angle) at its resonant frequency of 2.6 kHz.

Item Type:Article
Additional Information:SSSAMW 04 - Special Section of the Micromechanics Section of Sensors and Actuators based on contributions revised from the Technical Digest of the 2004 Solid-State Sensor, Actuator and Microsystems Workshop.
Uncontrolled Keywords: Bi-directional scanning; Electrothermal actuation; Large rotation angle; Large vertical displacement; Microactuators; Optical scanner; Vertical actuation
Subjects:Analytical Science > Nanotechnology for sensing and actuating
ID Code:4653
Deposited By:SPI
Deposited On:08 Apr 2009 17:47
Last Modified:08 Apr 2009 17:47

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