Nano Archive

Modeling of a Gc-sensing element for the interfacial toughness of metal thin films on substrates

Jeon, Insu and Omiya, Masaki and Kishimoto, Kikuo and Asahina, Tadashi and Im, Seyoung (2005) Modeling of a Gc-sensing element for the interfacial toughness of metal thin films on substrates. Sensors and Actuators A: Physical, 122 (2). 291 - 300.

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Official URL: http://www.sciencedirect.com/science/article/B6THG...

Abstract

A new type of the sensitive specimen named ‘Gc-sensing element’ that can be fabricated, using the plain and general micro-fabrication process, is proposed and modeled to measure the interfacial toughness Gc of metal thin films on substrates. For the whole modeling process of the Gc-sensing element, the finite element method and the concepts of the linear elastic fracture mechanics are applied. Moreover, the verification for energy-release rates calculated from the linear elastic fracture analysis is carried out, using the elastic–plastic fracture analysis. The results of this research show that the Gc-sensing element provides a simple and convenient method for measuring the precise interfacial toughness of metal thin films on substrates.

Item Type:Article
Uncontrolled Keywords:Gc-sensing element; Indentation; Metal thin films; Interfacial toughness
Subjects:Analytical Science > Nanotechnology for sensing and actuating
ID Code:4649
Deposited By:SPI
Deposited On:08 Apr 2009 17:56
Last Modified:08 Apr 2009 17:56

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