Nano Archive

Design consideration and fabrication of a microchannel system containing a set of heaters and an array of temperature sensors

Liu, Chien-Wei and Gau, Chie and Liu, Chin-Gi and Yang, Chin-Sheng (2005) Design consideration and fabrication of a microchannel system containing a set of heaters and an array of temperature sensors. Sensors and Actuators A: Physical, 122 (2). 177 - 183.

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Official URL: http://www.sciencedirect.com/science/article/B6THG...

Abstract

The objective of this paper is to present several possible design considerations and a fabrication process for a complicated microchannel system that contains a set of heaters, and an array of temperature sensors. The completed channel is tested and presented in this paper. This microchannel can allow liquid or air flow through the channel and the measured signals from these temperature sensors can be used to study the microthermal and flow transport processes. Information for the microflow and the heat transfer process is very important for the basic understanding in IC chip cooling. Both the insulation of the channel and uniform heating of the heater are also considered and analyzed in this paper so that an accurate heat transfer data can be obtained.

Item Type:Article
Uncontrolled Keywords:Microchannel system design; Microchannel fabrication; Heat transfer channel; Integrated device fabrication
Subjects:Analytical Science > Nanotechnology for sensing and actuating
ID Code:4644
Deposited By:SPI
Deposited On:06 Jul 2009 15:05
Last Modified:06 Jul 2009 15:05

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