Nano Archive

Fabrication and temperature coefficient compensation technology of low cost high temperature pressure sensor

Wang, Quan and Ding, Jianning and Wang, Wenxiang (2005) Fabrication and temperature coefficient compensation technology of low cost high temperature pressure sensor. Sensors and Actuators A: Physical, 120 (2). 468 - 473.

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Official URL: http://www.sciencedirect.com/science/article/B6THG...

Abstract

For the purposes of pressure measurement at high temperature in oil drilling industry as well as in other industrial measurement and control systems, the strain gauge chip of piezoresistive pressure sensor is designed based on separation by implanted oxygen (SIMOX) SOI (silicon on insulator) technology, and then fabricated in the micro-machining work bay. Some kinds of sensor mechanical structures are designed for different customers and conditions. The thermal coefficients of expansion (TCE) mismatches between different materials within the high-pressure sensor system are investigated. The sensor is fabricated successfully by using high temperature packaging process. The temperature coefficient of sensitivity (TCS) and temperature coefficient of offset (TCO) compensation circuitry is demonstrated. Based on experimental data, the sensor is tested with high accuracy and good stability.

Item Type:Article
Uncontrolled Keywords:High temperature pressure sensor; SIMOX; Fabrication; Compensation circuitry
Subjects:Analytical Science > Nanotechnology for sensing and actuating
ID Code:4638
Deposited By:SPI
Deposited On:06 Jul 2009 15:18
Last Modified:06 Jul 2009 15:18

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