Nano Archive

A piezoelectric/elastic spring-coupled surface profiler

Chang, S. H. and Chou, C. C. (2005) A piezoelectric/elastic spring-coupled surface profiler. Sensors and Actuators A: Physical, 120 (2). 317 - 324.

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Official URL: http://www.sciencedirect.com/science/article/B6THG...

Abstract

A piezoelectric element/elastic spring-coupled system is analyzed to simulate the mechanical and electrical characteristics of the surface profile probe. The coupled system includes a piezoelectric element with an elastic spring attached at the free end, and the spring is fixed at another end. The electro-elasticity theory is derived to formulate and solve the governing equations of the system. Two types of the piezoelectric element/elastic spring-coupled system are analyzed for the displacement, stress, resonant and anti-resonant frequencies, and with emphasis on the electromechanical coupling coefficient. Application of a d31-mode piezoelectric ceramic used as a surface profile probe is simulated for analysis of the frequency response, the resolution of displacement, and the contact force. Finally, a multilayered d33-mode piezoelectric ceramic/elastic spring-coupled specimen is constructed for experimental measurements. The agreement between theoretical and experimental results confirms the validity of the study.

Item Type:Article
Uncontrolled Keywords:Piezoelectric; Electro-elasticity; Surface profile probe
Subjects:Analytical Science > Nanotechnology for sensing and actuating
Analytical Science > Metrology and standards in nanotechnology
ID Code:4630
Deposited By:SPI
Deposited On:06 Jul 2009 15:39
Last Modified:06 Jul 2009 15:39

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