Kaul, Anupama B. and Wong, Eric W. and Epp, Larry and Hunt, Brian D. (2006) Electromechanical carbon nanotube switches for high-frequency applications. NANO LETTERS, 6 (5). pp. 942-947.
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Official URL: http://pubs.acs.org/doi/abs/10.1021/nl052552r
We describe the fabrication and characterization of a nanoelectromechanical (NEM) switch based on carbon nanotubes. Our NEM structure consists of single-walled nanotubes (SWNTs) suspended over shallow trenches in a SiO2 layer, with a Nb pull electrode beneath. The nanotube growth is done on-chip using a patterned Fe catalyst and a methane chemical vapor deposition (CVD) process at 850 degrees C. Electrical measurements of these devices show well-defined ON and OFF states as a dc bias up to a few volts is applied between the CNT and the Nb pull electrode. The CNT switches were measured to have speeds that are 3 orders of magnitude higher than MEMS-based electrostatically driven switches, with switching times down to a few nanoseconds, while at the same time requiring pull voltages less than 5 V.
|Subjects:||Physical Science > Nano objects|
Physical Science > Nanoelectronics
Engineering > Nanotechnology applications in ICT
|Deposited By:||Farnush Anwar|
|Deposited On:||22 Jan 2009 13:07|
|Last Modified:||22 Jan 2009 13:07|
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