Nano Archive

Fabrication and characterization of three-dimensional InGaAs/GaAs nanosprings

Bell, Dominik J. and Dong, L. X. and Nelson, B. J. and Golling, M and Zhang, L and Grutzmacher, D (2006) Fabrication and characterization of three-dimensional InGaAs/GaAs nanosprings. NANO LETTERS, 6 (4). pp. 725-729.

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Official URL: http://pubs.acs.org/doi/abs/10.1021/nl0525148

Abstract

This paper presents the use of a novel fabrication technique to produce three-dimensional (3D) nanostructures. The process is based on conventional microfabrication techniques to create a planar pattern in an InGaAs/GaAs bilayer that self-assembles into 3D structures during a wet etch release. The nanostructures are proposed to function as nanosprings for electromechanical sensors. Nanomanipulation inside a scanning electron microscope (SEM) was conducted to probe the structures for mechanical characterization. The results were validated by simulation.

Item Type:Article
Subjects:Material Science > Nanofabrication processes and tools
Technology > Manufacturing processes for nanotechnology
ID Code:3716
Deposited By:Farnush Anwar
Deposited On:22 Jan 2009 13:23
Last Modified:19 Feb 2009 17:43

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