Nano Archive

Nanoimprint lithography patterns with a vertically aligned nanoscale tubular carbon structure

Kim, Youn-Su and Lee, Kyeongmi and Lee, Jae Suk and Jung, Gun Young and Kim, Won Bae (2008) Nanoimprint lithography patterns with a vertically aligned nanoscale tubular carbon structure. NANOTECHNOLOGY, 19 (36).

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Official URL: http://www.iop.org/EJ/abstract/0957-4484/19/36/365...

Abstract

A nanoscale tubular carbon structure array was demonstrated as a mold for nanoimprint lithography (NIL), in which a vertically formed and hexagonally aligned nanoscale tubular carbon array was fabricated through carbon growth inside an anodic aluminum oxide (AAO) nanotemplate, followed by controlled chemical etching of the AAO layer. High density (over 10(10) cm(-2)) of the nanoscale carbon pillars with their controlled diameters and protruded lengths was inversely replicated onto a UV-curable resist for the first time using the imprinting lithography technique.

Item Type:Article
Subjects:Material Science > Nanofabrication processes and tools
Physical Science > Nano objects
Material Science > Nanostructured materials
ID Code:2376
Deposited By:Anuj Seth
Deposited On:17 Dec 2008 14:05
Last Modified:20 Jan 2009 10:33

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