Nano Archive

High-speed, sub-15 nm feature size thermochemical nanolithography

Szoszkiewicz, Robert and Okada, Takashi and Jones, Simon C. and Li, Tai-De and King, William P. and Marder, Seth R. and Riedo, Elisa (2007) High-speed, sub-15 nm feature size thermochemical nanolithography. NANO LETTERS, 7 (4). pp. 1064-1069. ISSN Print Edition ISSN: 1530-6984; Web Edition ISSN: 1530-6992

Full text is not hosted in this archive but may be available via the Official URL, or by requesting a copy from the corresponding author.

Official URL: http://pubs.acs.org/doi/abs/10.1021/nl070300f

Abstract

We report a nanolithography technique that allows simultaneous direct control of the local chemistry and topography of thin polymer films. Specifically, a heated atomic force microscope (AFM) tip can write sub-15 nm hydrophilic features onto a hydrophobic polymer at the rate of 1.4 mm per s. The thermally activated chemical reactions and topography changes depend on the chemical composition of the polymer, the raster speed, the temperature at the AFM tip/sample interface, and the normal load. This method is conceptually simple, direct, extremely rapid, achievable in a range of environments, and potentially adaptable to other materials systems.

Item Type:Article
Subjects:Physical Science > Nanoelectronics
Engineering > Nanotechnology applications in ICT
ID Code:2164
Deposited By:M T V
Deposited On:02 Jan 2009 12:12
Last Modified:02 Jan 2009 12:12

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