Shturkin, R.M. and Kadushnikov, N.A. (2007) Scanning electron microscope computing simulation for nanometric. Nanotechnologies in Russia, Volume 2 (11-12). pp. 40-48.
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Nanotechnology deals with nanoscale objects so the most important issue is the development of procedures and tools for measurements of linear dimensions in nanoscale. Such procedures should provide translation of length unit from primary standard of length to nanoscale range with appropriate accuracy. Basic feature of nanoscale measurements is that dimension of modern microscopes probe is comparable with dimensions of nanoobjects. Finite probe size leads to discrepancy between image form and true relief of nanoobjects. This effect originated in physical foundations and it is practically unavoidable. This is a principal limitation for usage of scanning electron microscope (SEM) or atomic-force microscope (AFM) as metrological instruments. To solve this problem we propose a concept of «virtual microscope». We propose to append the results of measurement simulations by «virtual microscope» modeling AFM or SEM to experimental results. On the first step one obtains an image of investigated nanoobject utilizing SEM or AFM. At the second step one makes an initial hypothesis about nanoobject relief. Then one generates mathematical model of investigated relief using a library of mathematical test-objects. At the next step one simulates an image with help of virtual microscope. The simulated image is parameterized and cross-correlation between parameters of test-object and simulated image are estimating. The parameters of the test-object are varying until the best coincidence of simulated image and measured one. The accuracy of found value of test-object parameters is estimated from the experimental uncertainties and cross-correlation curves. In this article authors represents their approach to SEM simulation. General model of SEM operating processes has been composed and prepared for ability of fast computation.
|Subjects:||Analytical Science > Microscopy and probe methods|
|Deposited By:||Prof. Alexey Ivanov|
|Deposited On:||19 Dec 2008 13:14|
|Last Modified:||16 Feb 2009 21:21|
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