Nano Archive

Testing and correction of optical elements with subnanometer precision

Kluyenkov, E. B. and Chkhalo, N. I. and Pestov, A. E. and Polkovnikov, V. N. and Raskin, D. G. and Toporov, M. N. and Salashchenko, N. N. (2008) Testing and correction of optical elements with subnanometer precision. Nanotechnologies in Russia, Volume 3 (9-10). pp. 602-610.

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Official URL: http://www.springerlink.com/content/e380438822n616...

Abstract

The paper is devoted to the fundamental physical and technological problems of manufacturing and testing high-precision optical elements and wave fronts of complex optical systems with subnanometer accuracy. The features of using a point diffraction interferometer (PDI) for measurements of high-numerical-aperture (NA ? 0.3) optics with generally aspherical surfaces are considered. A new type of PDI reference sphericalwave source used in the interferometer of the Institute for Physics of Microstructures (IPM) is described. The main technical characteristics of the IPM interferometer and the interferometer at the ALS synchrotron (United States) are compared. Some schemes of using the spherical reference wave interferometer for studying aspherical surfaces and their applications for testing the aspherical mirrors of a nanolithographic objective with an operating wavelength of 13.5 nm are considered. The techniques developed at the Institute for Physics of Microstructures for high-precision surface-shape correction are described, and the corresponding results are reported.

Item Type:Article
Subjects:Engineering > Nanotechnology applications in mechanical engineering
Analytical Science > Metrology and standards in nanotechnology
ID Code:2056
Deposited By:Prof. Alexey Ivanov
Deposited On:19 Dec 2008 13:10
Last Modified:19 Feb 2009 10:14

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