V.N., Fomichev M.A.Sajnev S.V. Timofeev (2006) Application of Threadlike Primary Converters in Thermal Based Mass Flow Controllers. Journal of NANO and MICROSYSTEM TECHNIQUE, 1 (1). pp. 39-43.
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Official URL: http://www.microsystems.ru/
Abstract
Threadlike primary semi-conductor and metal converters for physical sizes are considered. It is shown, that their use is perspective in development of more exact batching of a gas stream of thermalconductivity detectors in the process equipment of microelectronics.
| Item Type: | Article |
|---|---|
| Subjects: | Physical Science > Nanoelectronics |
| ID Code: | 2051 |
| Deposited By: | Prof. Alexey Ivanov |
| Deposited On: | 19 Dec 2008 13:22 |
| Last Modified: | 25 Jan 2009 01:14 |
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