V.N., Fomichev M.A.Sajnev S.V. Timofeev (2006) Application of Threadlike Primary Converters in Thermal Based Mass Flow Controllers. Journal of NANO and MICROSYSTEM TECHNIQUE, 1 (1). pp. 39-43.
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Threadlike primary semi-conductor and metal converters for physical sizes are considered. It is shown, that their use is perspective in development of more exact batching of a gas stream of thermalconductivity detectors in the process equipment of microelectronics.
|Subjects:||Physical Science > Nanoelectronics|
|Deposited By:||Prof. Alexey Ivanov|
|Deposited On:||19 Dec 2008 13:22|
|Last Modified:||25 Jan 2009 01:14|
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