Nano Archive

Application of Threadlike Primary Converters in Thermal Based Mass Flow Controllers

V.N., Fomichev M.A.Sajnev S.V. Timofeev (2006) Application of Threadlike Primary Converters in Thermal Based Mass Flow Controllers. Journal of NANO and MICROSYSTEM TECHNIQUE, 1 (1). pp. 39-43.

Full text is not hosted in this archive but may be available via the Official URL, or by requesting a copy from the corresponding author.

Official URL: http://www.microsystems.ru/

Abstract

Threadlike primary semi-conductor and metal converters for physical sizes are considered. It is shown, that their use is perspective in development of more exact batching of a gas stream of thermalconductivity detectors in the process equipment of microelectronics.

Item Type:Article
Subjects:Physical Science > Nanoelectronics
ID Code:2051
Deposited By:Prof. Alexey Ivanov
Deposited On:19 Dec 2008 13:22
Last Modified:25 Jan 2009 01:14

Repository Staff Only: item control page