Nano Archive

Method of Determination of Thermal Characteristics of Uncooled Semiconductor Microbolometers.

Birulin, P. V. and Chetverov, Yu. S. and Kudrjavzhev, P. N. and Zhukov, A. A. (2006) Method of Determination of Thermal Characteristics of Uncooled Semiconductor Microbolometers. Journal of NANO and MICROSYSTEM TECHNIQUE, 1 (1). pp. 24-27.

Full text is not hosted in this archive but may be available via the Official URL, or by requesting a copy from the corresponding author.

Official URL: http://www.microsystems.ru/

Abstract

The paper presents a method of determination of thermal characteristics of uncooled semiconductor microbolometers based on the use of a pulse mode with current stabilization. The paper studies performance of microbolometers with the following characteristics: pixel size ? 48x48 microns, thickness ? 0,45 microns, width of legs ? 1,6?2,0 microns, distance to silicon substrate ? 2,0?2,5 microns, resistance of vanadium-oxide-based sensitive element, 100?150 kiloohms. It is concluded that when residual pressure is below 2,5?10?3 Pa microbolometer thermal conductivity coefficient amounts to (1,54-2,93)?10?7 W/K; heating capacity ? (1,55-1,92)?10?9 J/K, and thermal time constant (relaxation time) ? 5,7?12,4 ms.

Item Type:Article
Subjects:Physical Science > Nanoelectronics
ID Code:2049
Deposited By:Prof. Alexey Ivanov
Deposited On:19 Dec 2008 13:22
Last Modified:12 Feb 2009 17:47

Repository Staff Only: item control page