Birulin, P. V. and Chetverov, Yu. S. and Kudrjavzhev, P. N. and Zhukov, A. A. (2006) Method of Determination of Thermal Characteristics of Uncooled Semiconductor Microbolometers. Journal of NANO and MICROSYSTEM TECHNIQUE, 1 (1). pp. 24-27.
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The paper presents a method of determination of thermal characteristics of uncooled semiconductor microbolometers based on the use of a pulse mode with current stabilization. The paper studies performance of microbolometers with the following characteristics: pixel size ? 48x48 microns, thickness ? 0,45 microns, width of legs ? 1,6?2,0 microns, distance to silicon substrate ? 2,0?2,5 microns, resistance of vanadium-oxide-based sensitive element, 100?150 kiloohms. It is concluded that when residual pressure is below 2,5?10?3 Pa microbolometer thermal conductivity coefficient amounts to (1,54-2,93)?10?7 W/K; heating capacity ? (1,55-1,92)?10?9 J/K, and thermal time constant (relaxation time) ? 5,7?12,4 ms.
|Subjects:||Physical Science > Nanoelectronics|
|Deposited By:||Prof. Alexey Ivanov|
|Deposited On:||19 Dec 2008 13:22|
|Last Modified:||12 Feb 2009 17:47|
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