Efremov, N. I. and Mukhurov, G. I. (2006) Modelling and Development of Perspective Microelectromechanical Structures of the Basis of Anodic Alumina. Journal of NANO and MICROSYSTEM TECHNIQUE, 1 (1). pp. 27-34.
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Features of construction of perspective microelectromechanical structures are analyzed on the basis of anodic alumina by results of modelling and theoretical calculation.
|Deposited By:||Prof. Alexey Ivanov|
|Deposited On:||19 Dec 2008 13:22|
|Last Modified:||25 Feb 2009 11:10|
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