Efremov, N. I. and Mukhurov, G. I. (2006) Modelling and Development of Perspective Microelectromechanical Structures of the Basis of Anodic Alumina. Journal of NANO and MICROSYSTEM TECHNIQUE, 1 (1). pp. 27-34.
Full text is not hosted in this archive but may be available via the Official URL, or by requesting a copy from the corresponding author.
Official URL: http://www.microsystems.ru/
Abstract
Features of construction of perspective microelectromechanical structures are analyzed on the basis of anodic alumina by results of modelling and theoretical calculation.
| Item Type: | Article |
|---|---|
| ID Code: | 2048 |
| Deposited By: | Prof. Alexey Ivanov |
| Deposited On: | 19 Dec 2008 13:22 |
| Last Modified: | 25 Feb 2009 11:10 |
Repository Staff Only: item control page
