Nano Archive

Modelling and Development of Perspective Microelectromechanical Structures of the Basis of Anodic Alumina.

Efremov, N. I. and Mukhurov, G. I. (2006) Modelling and Development of Perspective Microelectromechanical Structures of the Basis of Anodic Alumina. Journal of NANO and MICROSYSTEM TECHNIQUE, 1 (1). pp. 27-34.

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Official URL: http://www.microsystems.ru/

Abstract

Features of construction of perspective microelectromechanical structures are analyzed on the basis of anodic alumina by results of modelling and theoretical calculation.

Item Type:Article
ID Code:2048
Deposited By:Prof. Alexey Ivanov
Deposited On:19 Dec 2008 13:22
Last Modified:25 Feb 2009 11:10

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