N.A., Fedorov R.A.Shelepin (2006) Design of the Circuit Supporting Resonant Fluctuations of the Sensitive Element of Micromechanical System. Journal of NANO and MICROSYSTEM TECHNIQUE, 2 (2). pp. 35-39.
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The opportunity of joint modeling of differential capacitor mi-cromechanical system and the electric circuit is considered. Transfer function of system consisting of MEMS and the electric circuit supporting the resonant fluctuations is received, allowing to estimate a degree of influence of the basic parts.
|Deposited By:||Prof. Alexey Ivanov|
|Deposited On:||19 Dec 2008 13:21|
|Last Modified:||20 Mar 2009 08:58|
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