Nano Archive

Design of the Circuit Supporting Resonant Fluctuations of the Sensitive Element of Micromechanical System.

N.A., Fedorov R.A.Shelepin (2006) Design of the Circuit Supporting Resonant Fluctuations of the Sensitive Element of Micromechanical System. Journal of NANO and MICROSYSTEM TECHNIQUE, 2 (2). pp. 35-39.

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Official URL: http://www.microsystems.ru/

Abstract

The opportunity of joint modeling of differential capacitor mi-cromechanical system and the electric circuit is considered. Transfer function of system consisting of MEMS and the electric circuit supporting the resonant fluctuations is received, allowing to estimate a degree of influence of the basic parts.

Item Type:Article
ID Code:2043
Deposited By:Prof. Alexey Ivanov
Deposited On:19 Dec 2008 13:21
Last Modified:20 Mar 2009 08:58

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