N.A., Fedorov R.A.Shelepin (2006) Design of the Circuit Supporting Resonant Fluctuations of the Sensitive Element of Micromechanical System. Journal of NANO and MICROSYSTEM TECHNIQUE, 2 (2). pp. 35-39.
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Official URL: http://www.microsystems.ru/
Abstract
The opportunity of joint modeling of differential capacitor mi-cromechanical system and the electric circuit is considered. Transfer function of system consisting of MEMS and the electric circuit supporting the resonant fluctuations is received, allowing to estimate a degree of influence of the basic parts.
| Item Type: | Article |
|---|---|
| ID Code: | 2043 |
| Deposited By: | Prof. Alexey Ivanov |
| Deposited On: | 19 Dec 2008 13:21 |
| Last Modified: | 20 Mar 2009 08:58 |
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