S.A., Chetverov Yu.S.Fomichev M.A. Shkolnikov V. Ì. Zhukov A.A. Zhukova (2006) Testing Plate of Mullicrystal Micromodules (MCM) of Very-Large Scele Integration Circuit (VLSIC) for Avionic Systems. Journal of NANO and MICROSYSTEM TECHNIQUE, 3 (3). pp. 7-11.
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Official URL: http://www.microsystems.ru/
Topology of testing plate with high density of printed wiring for estimation electrical and physical parameters of thin film arrangement in multilevel com mutation-conversion devices for multicrystal micro-modules is developed. Manufacture process is offered and charac-teristics of multilevel structure on the base of metallization "vanadium-aluminum" with polyimide interlayer insulation are evaluated.
|Deposited By:||Prof. Alexey Ivanov|
|Deposited On:||19 Dec 2008 13:21|
|Last Modified:||20 Mar 2009 08:58|
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