Nano Archive

MEMS/MST in Modem Technology as an Example of Mo-locarstruclure and Aviation.

V., Beljaev (2006) MEMS/MST in Modem Technology as an Example of Mo-locarstruclure and Aviation. Journal of NANO and MICROSYSTEM TECHNIQUE, 5 (5). pp. 36-44.

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Official URL: http://www.microsystems.ru/

Abstract

The main criterions and the areas of use of microelectromechanical systems (MEMS) and microsystem technology (MST) product, the modem trends of market MEMS and MST are considered. The main foreign and Russia projectors and generators of products on the base of these technology are indicated. As an example of sensors for motocarstructure and aviation the process of exchange of traditional sensors on MST in USA and Russia is shown.

Item Type:Article
ID Code:2027
Deposited By:Prof. Alexey Ivanov
Deposited On:19 Dec 2008 13:21
Last Modified:20 Mar 2009 08:58

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