Nano Archive

Modeling of Three-Axis Integrated Micromechanical Gyroscope.

I.Å., Konoplev Â.G.Lysenko (2006) Modeling of Three-Axis Integrated Micromechanical Gyroscope. Journal of NANO and MICROSYSTEM TECHNIQUE, 7 (7). pp. 49-53.

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Official URL: http://www.microsystems.ru/

Abstract

Three-axis micromechanical gyroscope is described. The gyroscope is produced using surface micromachining. Stiffness model of the elastic suspension and gyroscope model are developed.

Item Type:Article
ID Code:2013
Deposited By:Prof. Alexey Ivanov
Deposited On:19 Dec 2008 13:21
Last Modified:20 Mar 2009 08:58

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