I.Å., Konoplev Â.G.Lysenko (2006) Modeling of Three-Axis Integrated Micromechanical Gyroscope. Journal of NANO and MICROSYSTEM TECHNIQUE, 7 (7). pp. 49-53.
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Abstract
Three-axis micromechanical gyroscope is described. The gyroscope is produced using surface micromachining. Stiffness model of the elastic suspension and gyroscope model are developed.
| Item Type: | Article |
|---|---|
| ID Code: | 2013 |
| Deposited By: | Prof. Alexey Ivanov |
| Deposited On: | 19 Dec 2008 13:21 |
| Last Modified: | 20 Mar 2009 08:58 |
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