Galyshkov, A. I. and Pankratov, O. V. and Pogalov, A. I. (2006) The Methods of Design and Calibration Microelectronic Piezoresistive Transducers of Acceleration. Journal of NANO and MICROSYSTEM TECHNIQUE, 7 (7). pp. 45-48.
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Official URL: http://www.microsystems.ru/
Abstract
The methods of design and calibration of microelectronic piezoresistive transducers of acceleration have been presented. Transducer been made in experimental manufacture. Its have optimum construction, good mechanical and metrology specifications.
| Item Type: | Article |
|---|---|
| ID Code: | 2010 |
| Deposited By: | Prof. Alexey Ivanov |
| Deposited On: | 19 Dec 2008 13:21 |
| Last Modified: | 26 Mar 2009 14:35 |
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