Gornev, À. N. and Matiushkin, E. S. and Safronov, I. V. and Zaitsev, A. Ya. (2006) The Development of a Design and Manufacturing Techniques for Microsystems on the Basis of Bulk Silicon and Thin Films of Pieyxeramics. Journal of NANO and MICROSYSTEM TECHNIQUE, 8 (8). pp. 30-33.
Full text is not hosted in this archive but may be available via the Official URL, or by requesting a copy from the corresponding author.
Official URL: http://www.microsystems.ru/
The opportunity of application in miñroelectromechanical systems (MEMS) of piezoceramic elements on basis PZT is considered. It is shown, that the most perspective methods of PZT films (thickness is about 1 mkm) fabrication arc sol gel technique and magnetron sputtering. By the example of a matrix of the piezoactuated micro-mirrors, the ways of p-MEMS creation are discussed.
|Subjects:||Material Science > Functional and hybrid materials|
Material Science > Nanostructured materials
|Deposited By:||Prof. Alexey Ivanov|
|Deposited On:||19 Dec 2008 13:20|
|Last Modified:||03 Mar 2009 13:56|
Repository Staff Only: item control page