Gornev, À. N. and Matiushkin, E. S. and Safronov, I. V. and Zaitsev, A. Ya. (2006) The Development of a Design and Manufacturing Techniques for Microsystems on the Basis of Bulk Silicon and Thin Films of Pieyxeramics. Journal of NANO and MICROSYSTEM TECHNIQUE, 8 (8). pp. 30-33.
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Abstract
The opportunity of application in miñroelectromechanical systems (MEMS) of piezoceramic elements on basis PZT is considered. It is shown, that the most perspective methods of PZT films (thickness is about 1 mkm) fabrication arc sol gel technique and magnetron sputtering. By the example of a matrix of the piezoactuated micro-mirrors, the ways of p-MEMS creation are discussed.
| Item Type: | Article |
|---|---|
| Subjects: | Material Science > Functional and hybrid materials Material Science > Nanostructured materials |
| ID Code: | 2005 |
| Deposited By: | Prof. Alexey Ivanov |
| Deposited On: | 19 Dec 2008 13:20 |
| Last Modified: | 03 Mar 2009 13:56 |
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